Kiyoto Inomata: search on Z-Library

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1

Open-air silicon etching by H2–He–CH4 flowing cold plasma

Khaliq Chaudhary, Kiyoto Inomata, Mamoru Yoshimoto, Hideomi Koinuma

Journal:

Materials Letters

Year:

2003

Language:

english

File:

PDF, 241 KB

english, 2003

2

Open air deposition of SiO2 film from a cold plasma torch of tetramethoxysilane-H2-Ar system

Inomata, Kiyoto, Ha, Hyunkwon, Chaudhary, Khaliq A., Koinuma, Hideomi

Journal:

Applied Physics Letters

Year:

1994

Language:

english

File:

PDF, 655 KB

english, 1994

3

Development and application of a microbeam plasma generator

Koinuma, Hideomi, Ohkubo, Hiroyuki, Hashimoto, Takuya, Inomata, Kiyoto, Shiraishi, Tadashi, Miyanaga, Akiharu, Hayashi, Shigenori

Journal:

Applied Physics Letters

Year:

1992

Language:

english

File:

PDF, 472 KB

english, 1992

4

Open air photoresist ashing by a cold plasma torch: Catalytic effect of cathode material

Inomata, Kiyoto, Koinuma, Hideomi, Oikawa, Yoshiyuki, Shiraishi, Tadashi

Journal:

Applied Physics Letters

Year:

1995

Language:

english

File:

PDF, 373 KB

english, 1995

5

Production of Fullerenes by Low Temperature Plasma Chemical Vaper Deposition under Atmospheric Pressure

Inomata, Kiyoto, Aoki, Nobuyuki, Koinuma, Hideomi

Journal:

Japanese Journal of Applied Physics

Year:

1994

File:

PDF, 419 KB

1994

6

Synthesis of carbon clusters and thin films by low temperature plasma chemical vapor deposition under atmospheric pressure

Koinuma, H., Horiuchi, Takao, Inomata, Kiyoto, Ha, H.-K., Nakajima, K., Chaudhary, K. A.

Journal:

Pure & Applied Chemistry

Year:

1996

Language:

english

File:

PDF, 378 KB

english, 1996

7

Preparation of Activated Carbon Pellets without Binder and Their Methane Adsorption Propertie

Kanazawa, Kazuhiro, Inomata, Kiyoto, Urabe, Yasuhiko, Hosono, Hideyuki, Araki, Toshinari

Journal:

Year:

2001

File:

PDF, 3.96 MB

2001